Impact of the buried oxide thickness in UV laser heated 3D stacks

Pierre Morin

doi:https://doi.org/10.7567/SSDM.2021.A-6-03

16:22 〜 16:29

[A-6-03] Impact of the buried oxide thickness in UV laser heated 3D stacks

Pierre Morin¹、〇Toshiyuki Tabata²、Fabien Rozé ²、Mohamed Saib ¹、Hilde Thielens ¹、Louis Thuries ²、Karim Huet²、Fulvio Mazzamuto ² (1.imec、2.Laser Systems & Solutions of Europe (LASSE))

https://doi.org/10.7567/SSDM.2021.A-6-03

2021 International Conference on Solid State Devices and Materials

[A-6-03] Impact of the buried oxide thickness in UV laser heated 3D stacks