16:57 〜 17:04

[A-6-08] TCAD Simulation for Capture / Emission of Carriers by Traps in SiN: Trap-Assisted Tunneling Model Extended for Capture of Carriers Injected via Fowler-Nordheim Tunneling

〇Michiru Hogyoku¹、Yoshinori Yokota¹、Kazuhito Nishitani¹ (1.KIOXIA Corp.)

https://doi.org/10.7567/SSDM.2021.A-6-08