Enablement of Next Generation Nanosheet Technology

Nicolas Loubet

doi:https://doi.org/10.7567/SSDM.2021.A-7-01

09:00 〜 09:30

[A-7-01 (Invited)] Enablement of Next Generation Nanosheet Technology

〇Nicolas Loubet¹、Curtis Durfee ¹、Julien Frougier¹、Shogo Mochizuki¹、Maruf Bhuiyan ¹、Ruqiang Bao ¹、Andrew Greene¹、Eric Miller¹、Indira Seshadri¹ (1.IBM Research)

https://doi.org/10.7567/SSDM.2021.A-7-01

2021 International Conference on Solid State Devices and Materials

[A-7-01 (Invited)] Enablement of Next Generation Nanosheet Technology