09:30 〜 09:37

[A-7-02] High Density & High Drive Current Elongated SGT Transistor for Logic Circuit Having Process Compatibility with 1.5nm node SGT SRAM

〇Kenichi Kanazawa¹、Yisuo Li³、Tetsuo Izawa¹、Koji Sakui¹、Georg Strof²、Oskar Baumgartner²、Gerhard Rzepa²、Markus Karner²、Zlatan Stanojevic²、Nozomu Harada¹ (1.Semicon Consulting Ltd.、2.Global TCAD Solutions Ltd.、3.Unisantis Electronics Singapore Pre Ltd.)

https://doi.org/10.7567/SSDM.2021.A-7-02