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[A-7-02] High Density & High Drive Current Elongated SGT Transistor for Logic Circuit Having Process Compatibility with 1.5nm node SGT SRAM

〇Kenichi Kanazawa¹, Yisuo Li³, Tetsuo Izawa¹, Koji Sakui¹, Georg Strof², Oskar Baumgartner², Gerhard Rzepa², Markus Karner², Zlatan Stanojevic², Nozomu Harada¹ (1.Semicon Consulting Ltd., 2.Global TCAD Solutions Ltd., 3.Unisantis Electronics Singapore Pre Ltd.)

https://doi.org/10.7567/SSDM.2021.A-7-02