10:05 AM - 10:12 AM

[A-7-07] Low-Temperature Fabrication of Ge MOS Capacitor with Wet Oxidized Yttrium Interlayer

〇Keisuke Yamamoto¹, Kento Iseri¹, Dong Wang¹, Hiroshi Nakashima¹ (1.Kyushu Univ.)

https://doi.org/10.7567/SSDM.2021.A-7-07