High-Performance Amorphous InGaZnO FET as a Key Enabler for Low Thermal Budget (350<sup>O</sup>C) BEOL Monolithic 3-D Integration

10:52 AM - 10:59 AM

[A-8-02] High-Performance Amorphous InGaZnO FET as a Key Enabler for Low Thermal Budget (350^OC) BEOL Monolithic 3-D Integration

〇CHUNKUEI CHEN¹, Umesh Chand¹, Xinghua Wang¹, Zihang Fang¹, Sonu Hooda¹, Shih-Hao Tsai¹, Aaron Voon Yew Thean¹ (1.National Univ. of Singapore)