10:52 〜 10:59

[A-8-02] High-Performance Amorphous InGaZnO FET as a Key Enabler for Low Thermal Budget (350^OC) BEOL Monolithic 3-D Integration

〇CHUNKUEI CHEN¹、Umesh Chand¹、Xinghua Wang¹、Zihang Fang¹、Sonu Hooda¹、Shih-Hao Tsai¹、Aaron Voon Yew Thean¹ (1.National Univ. of Singapore)

https://doi.org/10.7567/SSDM.2021.A-8-02