10:59 AM - 11:06 AM

[A-8-03] Statistical Analysis on Threshold Voltage Variability of CAAC-IGZO FETs Using Large-Scale Array TEG

Yuki - Ito¹, 〇Toshiki - Hamada¹, Yoshinori - Ando¹, Masahiro - Takahashi¹, Tsutomu - Murakawa¹, Hitoshi - Kunitake¹, Masaharu - Kobayashi², Kuo Chang Huang³, Hiroshi - Yoshida³, Miller - Liao⁴, Shou Zen Chang³, Shunpei - Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd., 2.d.lab, School of Engineering, the University of Tokyo, 3.Powerchip Semiconductor Manufacturing Corporation, 4.National Taiwan University)

https://doi.org/10.7567/SSDM.2021.A-8-03