10:59 〜 11:06

[A-8-03] Statistical Analysis on Threshold Voltage Variability of CAAC-IGZO FETs Using Large-Scale Array TEG

Yuki - Ito¹、〇Toshiki - Hamada¹、Yoshinori - Ando¹、Masahiro - Takahashi¹、Tsutomu - Murakawa¹、Hitoshi - Kunitake¹、Masaharu - Kobayashi²、Kuo Chang Huang³、Hiroshi - Yoshida³、Miller - Liao⁴、Shou Zen Chang³、Shunpei - Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd.、2.d.lab, School of Engineering, the University of Tokyo、3.Powerchip Semiconductor Manufacturing Corporation、4.National Taiwan University)

https://doi.org/10.7567/SSDM.2021.A-8-03