11:06 〜 11:13

[A-8-04] Simulation Study on Memory Characteristics of IGZO-Channel FeFET from 2D Planer to 3D Vertical Structure for Channel Structure Engineering

Fei Mo¹、Xiaoran Mei¹、Takuya Saraya¹、Toshiro Hiramoto¹、〇Masaharu Kobayashi¹ (1.Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.A-8-04