Simulation Study on Memory Characteristics of IGZO-Channel FeFET from 2D Planer to 3D Vertical Structure for Channel Structure Engineering

11:06 AM - 11:13 AM

[A-8-04] Simulation Study on Memory Characteristics of IGZO-Channel FeFET from 2D Planer to 3D Vertical Structure for Channel Structure Engineering

Fei Mo¹, Xiaoran Mei¹, Takuya Saraya¹, Toshiro Hiramoto¹, 〇Masaharu Kobayashi¹ (1.Univ. of Tokyo)