Thermally Stable ALD Dielectric Stack for IDM MOS Device

Shutaro Asanuma

doi:https://doi.org/10.7567/SSDM.2021.B-2-07

16:50 〜 16:57

[B-2-07] Thermally Stable ALD Dielectric Stack for IDM MOS Device

〇Shutaro Asanuma¹、Kyoko Sumita¹、Yusuke Miyaguchi²、Takeshi Masuda²、Kazumasa Horita²、Takehito Jimbo²、Kazuya Saito²、Noriyuki Miyata¹ (1.AIST、2.ULVAC, Inc.)

https://doi.org/10.7567/SSDM.2021.B-2-07

2021 International Conference on Solid State Devices and Materials

[B-2-07] Thermally Stable ALD Dielectric Stack for IDM MOS Device