Thermally Stable ALD Dielectric Stack for IDM MOS Device

Shutaro Asanuma, Kyoko Sumita, Yusuke Miyaguchi, Takeshi Masuda, Kazumasa Horita, Takehito Jimbo, Kazuya Saito, Noriyuki Miyata

doi:https://doi.org/10.7567/SSDM.2021.B-2-07

4:50 PM - 4:57 PM

[B-2-07] Thermally Stable ALD Dielectric Stack for IDM MOS Device

〇Shutaro Asanuma¹, Kyoko Sumita¹, Yusuke Miyaguchi², Takeshi Masuda², Kazumasa Horita², Takehito Jimbo², Kazuya Saito², Noriyuki Miyata¹ (1.AIST, 2.ULVAC, Inc.)

https://doi.org/10.7567/SSDM.2021.B-2-07

2021 International Conference on Solid State Devices and Materials

[B-2-07] Thermally Stable ALD Dielectric Stack for IDM MOS Device