Hard X-ray Photoemission Spectroscopy Study on Interface Dipole Modulation of HfO<sub>2</sub>/SiO<sub>2</sub> MIM Device

9:07 AM - 9:14 AM

[B-3-02] Hard X-ray Photoemission Spectroscopy Study on Interface Dipole Modulation of HfO₂/SiO₂ MIM Device

〇Yoshiharu Kirihara¹, Ryota Tsujiguti¹, Reito Wada¹, Akira Yasui², Noriyuki Miyata³, Hiroshi Nohira¹ (1.Tokyo City Univ., 2.JASRI, 3.AIST)