Hard X-ray Photoemission Spectroscopy Study on Interface Dipole Modulation of HfO<sub>2</sub>/SiO<sub>2</sub> MIM Device

09:07 〜 09:14

[B-3-02] Hard X-ray Photoemission Spectroscopy Study on Interface Dipole Modulation of HfO₂/SiO₂ MIM Device

〇Yoshiharu Kirihara¹、Ryota Tsujiguti¹、Reito Wada¹、Akira Yasui²、Noriyuki Miyata³、Hiroshi Nohira¹ (1.Tokyo City Univ.、2.JASRI、3.AIST)