Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider V<sub>th</sub> Window in 3D NAND Flash Using Machine Learning Methodology

Kihoon Nam, Chanyang Park, Jun-Sik Yoon, Hyeok Yun, Hyundong Jang, Kyeongrae Cho, Hojung Kang, Min Sang Park, Haesoon Oh, Jaesung Sim, Rock-Hyun Baek

doi:https://doi.org/10.7567/SSDM.2021.B-5-05

2:51 PM - 2:58 PM

[B-5-05] Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider V_th Window in 3D NAND Flash Using Machine Learning Methodology

〇Kihoon Nam¹, Chanyang Park¹, Jun-Sik Yoon¹, Hyeok Yun¹, Hyundong Jang¹, Kyeongrae Cho¹, Hojung Kang², Min Sang Park³, Haesoon Oh², Jaesung Sim², Rock-Hyun Baek¹ (1.Department of Electrical Engineering, Pohang Univ. of Sci. and Tech. (POSTECH), Pohang, 37673, 2.SK hynix Inc., Cheongju-si, Chungcheongbuk-do, 28429, 3.SK hynix Inc., Icheon-si, Gyeonggi-do, 17336)

https://doi.org/10.7567/SSDM.2021.B-5-05

2021 International Conference on Solid State Devices and Materials

[B-5-05] Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider Vth Window in 3D NAND Flash Using Machine Learning Methodology

[B-5-05] Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider V_th Window in 3D NAND Flash Using Machine Learning Methodology