Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider V<sub>th</sub> Window in 3D NAND Flash Using Machine Learning Methodology

Kihoon Nam

doi:https://doi.org/10.7567/SSDM.2021.B-5-05

14:51 〜 14:58

[B-5-05] Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider V_th Window in 3D NAND Flash Using Machine Learning Methodology

〇Kihoon Nam¹、Chanyang Park¹、Jun-Sik Yoon¹、Hyeok Yun¹、Hyundong Jang¹、Kyeongrae Cho¹、Hojung Kang²、Min Sang Park³、Haesoon Oh²、Jaesung Sim²、Rock-Hyun Baek¹ (1.Department of Electrical Engineering, Pohang Univ. of Sci. and Tech. (POSTECH), Pohang, 37673、2.SK hynix Inc., Cheongju-si, Chungcheongbuk-do, 28429、3.SK hynix Inc., Icheon-si, Gyeonggi-do, 17336)

https://doi.org/10.7567/SSDM.2021.B-5-05

2021 International Conference on Solid State Devices and Materials

[B-5-05] Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider Vth Window in 3D NAND Flash Using Machine Learning Methodology

[B-5-05] Optimal Energetic Trap Distribution of Charge Trap Nitride for Wider V_th Window in 3D NAND Flash Using Machine Learning Methodology