Technology Challenge and Opportunity of HfO<sub>2</sub>-based FeFET Memory

15:45 〜 16:15

[B-6-01 (Invited)] Technology Challenge and Opportunity of HfO₂-based FeFET Memory

〇Masaharu Kobayashi¹、Fei Mo¹、Jiawen Xiang¹、Jixuan Wu¹、Takuya Saraya¹、Toshiro Hiramoto¹ (1.The Univ. of Tokyo)