16:15 〜 16:22

[B-6-02] Scaling Behavior of FeFET with Domain Reduction in Ferroelectric Layer

Sourabh Jindal¹、Simone Balatti²、Arvind Kumar²、Mahendra Pakala²、〇Sanjeev Kumar Manhas¹ (1.ECE Dept, Indian Institute of Technology Roorkee、2.Advanced Product and Technology Development (APTD), Applied Materials)

https://doi.org/10.7567/SSDM.2021.B-6-02