4:15 PM - 4:22 PM

[B-6-02] Scaling Behavior of FeFET with Domain Reduction in Ferroelectric Layer

Sourabh Jindal¹, Simone Balatti², Arvind Kumar², Mahendra Pakala², 〇Sanjeev Kumar Manhas¹ (1.ECE Dept, Indian Institute of Technology Roorkee, 2.Advanced Product and Technology Development (APTD), Applied Materials)

https://doi.org/10.7567/SSDM.2021.B-6-02