11:50 AM - 11:57 AM

[C-4-07] Low-temperature deposited SiN_x films for TSV in 3D-LSI

〇Masaru Sato¹, Mayumi B. Takeyama¹ (1.Kitami Inst. of Tech.)

https://doi.org/10.7567/SSDM.2021.C-4-07