11:50 〜 11:57

[C-4-07] Low-temperature deposited SiN_x films for TSV in 3D-LSI

〇Masaru Sato¹、Mayumi B. Takeyama¹ (1.Kitami Inst. of Tech.)

https://doi.org/10.7567/SSDM.2021.C-4-07