14:00 〜 14:30

[C-5-01 (Invited)] Haptic MEMS Based on Novel Ultra-Thin MEMS Technology

〇Takeshi Kobayashi¹、Toshiihro Takeshita¹ (1.National Institute of Advanced Industrial Science and Technology (AIST))

https://doi.org/10.7567/SSDM.2021.C-5-01