2:58 PM - 3:05 PM

[C-5-06] Minimizing substrate and interface effects to pattern aligned SiGe nanopores

〇Cian Cummins¹, Abhilash Paneri¹, Kouhei Takahashi ², Sandeep S Saseendran¹, Deniz S Tezcan ¹ (1.Imec, 2.Panasonic Corporation)

https://doi.org/10.7567/SSDM.2021.C-5-06