14:58 〜 15:05

[C-5-06] Minimizing substrate and interface effects to pattern aligned SiGe nanopores

〇Cian Cummins¹、Abhilash Paneri¹、Kouhei Takahashi ²、Sandeep S Saseendran¹、Deniz S Tezcan ¹ (1.Imec、2.Panasonic Corporation)

https://doi.org/10.7567/SSDM.2021.C-5-06