11:57 〜 12:04

[D-4-08] Zigzag Structure of Partial Dislocations Expanded from Basal Plane Dislocation Segment near the Epilayer Surface of 4H-SiC

〇Johji Nishio¹、Chiharu Ota¹、Ryosuke Iijima¹ (1.Toshiba Corp.)

https://doi.org/10.7567/SSDM.2021.D-4-08