The Japan Society of Applied Physics

4:29 PM - 4:36 PM

[D-6-04] DC Characteristics of the p-NiOx/n-Ga2O3 Junction FETs Based on Heterointegrated Ga2O3-on-SiC by Ion Cutting Process

〇Haodong Hu1, Hehe Gong2, Wenhui Xu3, Yibo Wang1, Tiangui You3, Genquan Han1, Jiandong Ye2, Xin Ou3, Yan Liu1, Yue Hao1 (1.Xidian University, 2.Nanjing University, 3.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences)

https://doi.org/10.7567/SSDM.2021.D-6-04