DFT study on structure and anisotropy of high N-atom density layer in 4H-SiC

4:36 PM - 4:43 PM

[D-6-05] DFT study on structure and anisotropy of high N-atom density layer in 4H-SiC

〇Naoki Komatsu¹, Yoshiyuki Egami², Tomoya Ono¹, Mitsuharu Uemoto¹ (1.Kobe Univ., 2.Hokkaido Univ.)