DFT study on structure and anisotropy of high N-atom density layer in 4H-SiC

16:36 〜 16:43

[D-6-05] DFT study on structure and anisotropy of high N-atom density layer in 4H-SiC

〇Naoki Komatsu¹、Yoshiyuki Egami²、Tomoya Ono¹、Mitsuharu Uemoto¹ (1.Kobe Univ.、2.Hokkaido Univ.)