16:43 〜 16:50

[D-6-06] Mobility Reduction by Carbon Cluster Defects in SiC MOSFETS

〇John Robertson¹、Zhaofu Zhang¹、Yuzheng Guo² (1.Cambridge Univ.、2.Swansea Univ.)

https://doi.org/10.7567/SSDM.2021.D-6-06