Emerging Low-Loss Phase Change Material Enabling Non-Volatile Optical Phase Modulation

Arnaud Taute, Régis Orobtchouk, Eva Kempf, Stéphane Monfray, Lotfi Berguiga, Xavier Letartre, Sébastien Cueff

doi:https://doi.org/10.7567/SSDM.2021.E-2-02

4:15 PM - 4:22 PM

[E-2-02] Emerging Low-Loss Phase Change Material Enabling Non-Volatile Optical Phase Modulation

〇Arnaud Taute^1,2, Régis Orobtchouk², Eva Kempf^1,2, Stéphane Monfray¹, Lotfi Berguiga², Xavier Letartre², Sébastien Cueff² (1.STMicroelectronics, 2.Institut des Nanotechnologies de Lyon)

https://doi.org/10.7567/SSDM.2021.E-2-02

2021 International Conference on Solid State Devices and Materials

[E-2-02] Emerging Low-Loss Phase Change Material Enabling Non-Volatile Optical Phase Modulation