Emerging Low-Loss Phase Change Material Enabling Non-Volatile Optical Phase Modulation

Arnaud Taute

doi:https://doi.org/10.7567/SSDM.2021.E-2-02

16:15 〜 16:22

[E-2-02] Emerging Low-Loss Phase Change Material Enabling Non-Volatile Optical Phase Modulation

〇Arnaud Taute^1,2、Régis Orobtchouk²、Eva Kempf^1,2、Stéphane Monfray¹、Lotfi Berguiga²、Xavier Letartre²、Sébastien Cueff² (1.STMicroelectronics、2.Institut des Nanotechnologies de Lyon)

https://doi.org/10.7567/SSDM.2021.E-2-02

2021 International Conference on Solid State Devices and Materials

[E-2-02] Emerging Low-Loss Phase Change Material Enabling Non-Volatile Optical Phase Modulation