16:22 〜 16:29

[E-2-03] Advanced Optical Filtering Based on Si Nanodisk Integration on 300 mm Glass Wafer

〇Sandrine Villenave^1,2,3、Stéphane Monfray¹、Henri Benisty²、Quentin Abadie³、Stéphanie Audran¹、Simon Guillaumet¹、Benjamin Vianne¹、Delia Ristoiu¹、François Leverd¹、Elodie Sungauer¹、Pascal Chevalier¹ (1.STMicroelectronics、2.Univ. Paris-Saclay, Inst. d'Optique Graduate School, CNRS, Lab. Charles Fabry、3.Univ. Grenoble Alpes, CEA, LETI)

https://doi.org/10.7567/SSDM.2021.E-2-03