4:22 PM - 4:29 PM

[E-2-03] Advanced Optical Filtering Based on Si Nanodisk Integration on 300 mm Glass Wafer

〇Sandrine Villenave^1,2,3, Stéphane Monfray¹, Henri Benisty², Quentin Abadie³, Stéphanie Audran¹, Simon Guillaumet¹, Benjamin Vianne¹, Delia Ristoiu¹, François Leverd¹, Elodie Sungauer¹, Pascal Chevalier¹ (1.STMicroelectronics, 2.Univ. Paris-Saclay, Inst. d'Optique Graduate School, CNRS, Lab. Charles Fabry, 3.Univ. Grenoble Alpes, CEA, LETI)

https://doi.org/10.7567/SSDM.2021.E-2-03