2:58 PM - 3:05 PM

[E-5-06] Fabrication and characterization of AlGaN p-n diode with ZnO as a tunnel junction layer

〇Shun Ukita¹, Jun Morimoto¹, Masaya Daikoku¹, Sun Zheng¹, Takeyoshi Tajiri¹, Kazuo Uchida¹ (1.University of Electro-Communications)

https://doi.org/10.7567/SSDM.2021.E-5-06