H  igh-performance     β-Ga<sub>2</sub>O<sub>3</sub> Solar-Blind Metal-Oxide-Semiconductor Field-Effect Phototransistor Based on Hafnium Oxide     Gate Dielectric

Zhe Li, Zhaoqing Feng, Yu Xu, Qian Feng, Jincheng Zhang, Chunfu Zhang, Yue Hao

doi:https://doi.org/10.7567/SSDM.2021.E-6-03

4:22 PM - 4:29 PM

[E-6-03] H igh-performance β-Ga₂O₃ Solar-Blind Metal-Oxide-Semiconductor Field-Effect Phototransistor Based on Hafnium Oxide Gate Dielectric

〇Zhe Li¹, Zhaoqing Feng¹, Yu Xu¹, Qian Feng¹, Jincheng Zhang¹, Chunfu Zhang¹, Yue Hao¹ (1.Wide Bandgap Semiconductor Tech. Disciplines State Key Lab., School of Microelectronics, Xidian University)

https://doi.org/10.7567/SSDM.2021.E-6-03

2021 International Conference on Solid State Devices and Materials

[E-6-03] H igh-performance β-Ga2O3 Solar-Blind Metal-Oxide-Semiconductor Field-Effect Phototransistor Based on Hafnium Oxide Gate Dielectric

[E-6-03] H igh-performance β-Ga₂O₃ Solar-Blind Metal-Oxide-Semiconductor Field-Effect Phototransistor Based on Hafnium Oxide Gate Dielectric