2:30 PM - 2:37 PM

[F-1-02] Vibrational Energy Harvester Made by Simultaneous Process for Anodic Bonding and Electret Charging

〇Hiroaki Honma¹, Sho Ikeno¹, Hiroshi Toshiyoshi¹ (1.Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.F-1-02