14:30 〜 14:37

[F-1-02] Vibrational Energy Harvester Made by Simultaneous Process for Anodic Bonding and Electret Charging

〇Hiroaki Honma¹、Sho Ikeno¹、Hiroshi Toshiyoshi¹ (1.Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.F-1-02