Study on the Morphology of Silicon Nanowire Arrays by Using   Highly Doped Silicon

2:37 PM - 2:44 PM

[F-1-03] Study on the Morphology of Silicon Nanowire Arrays by Using Highly Doped Silicon

〇Haibin Li¹, Shinya Kato¹, Yasuyoshi Kurokawa², Tetsuo Soga¹ (1.Univ. of Nagoya Institute of Technology, 2.Univ. of Nagoya)