Effect of Metal Heat Guide Structure on the Performance of Planar Si Thermoelectric Generator Embedded in SiO<sub>2</sub> Inter-layer Dielectric

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[F-1-08] Effect of Metal Heat Guide Structure on the Performance of Planar Si Thermoelectric Generator Embedded in SiO₂ Inter-layer Dielectric

〇Tsubasa Kashizaki¹、Motohiro Tomita¹、Kazuki Katayama¹、Takeo Matsuki^1,2、Sylvia Yuk Yee Chung¹、Takanobu Watanabe¹ (1.Univ. of Waseda、2.AIST)