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[F-1-08] Effect of Metal Heat Guide Structure on the Performance of Planar Si Thermoelectric Generator Embedded in SiO₂ Inter-layer Dielectric

〇Tsubasa Kashizaki¹, Motohiro Tomita¹, Kazuki Katayama¹, Takeo Matsuki^1,2, Sylvia Yuk Yee Chung¹, Takanobu Watanabe¹ (1.Univ. of Waseda, 2.AIST)

https://doi.org/10.7567/SSDM.2021.F-1-08