14:00 〜 14:30

[F-5-01 (Invited)] Roadmap for Industrial Mass Production Equipment for High Efficiency Silicon Heterojunction Solar Cells

〇Xuemei Cheng¹、Simon Hübner¹、Andre Wendel¹、Peter Wohlfart ¹ (1.Singulus Technologies AG)

https://doi.org/10.7567/SSDM.2021.F-5-01