2:37 PM - 2:44 PM

[F-5-03] Hydrogenation on Tunnel Nitride Passivated Contacts by Catalytically Generated Atomic Hydrogen

〇YULI WEN¹, Huynh Thi Cam Tu¹, Keisuke Ohdaira¹ (1.JAIST)

https://doi.org/10.7567/SSDM.2021.F-5-03