Passivation Quality and Conductivity Improvements of Counter-doped Amorphous Silicon Films by Flash Lamp Annealing

14:51 〜 14:58

[F-5-05] Passivation Quality and Conductivity Improvements of Counter-doped Amorphous Silicon Films by Flash Lamp Annealing

〇Yujia LIU¹、Huynh Thi Cam Tu¹、Noboru Yamaguchi²、Keisuke Ohdaira¹ (1.JAIST、2.ULVAC, Inc.)