2:51 PM - 2:58 PM

[F-5-05] Passivation Quality and Conductivity Improvements of Counter-doped Amorphous Silicon Films by Flash Lamp Annealing

〇Yujia LIU¹, Huynh Thi Cam Tu¹, Noboru Yamaguchi², Keisuke Ohdaira¹ (1.JAIST, 2.ULVAC, Inc.)

https://doi.org/10.7567/SSDM.2021.F-5-05