Grain Size Enlargement in 2D WS<sub>2</sub> Film with Low-Power RF-Magnetron Sputtering

Takuya Hamada

doi:https://doi.org/10.7567/SSDM.2021.H-2-04

16:29 〜 16:36

[H-2-04] Grain Size Enlargement in 2D WS₂ Film with Low-Power RF-Magnetron Sputtering

〇Takuya Hamada¹、Taiga Horiguchi¹、Masaya Hamada¹、Iriya Muneata¹、Kuniyuki Kakushima¹、Kazuo Tsutsui¹、Tetsuya Tatsumi¹、Shigetaka Tomiya¹、Hitoshi Wakabayashi¹ (1.Tokyo Tech)

https://doi.org/10.7567/SSDM.2021.H-2-04

2021 International Conference on Solid State Devices and Materials

[H-2-04] Grain Size Enlargement in 2D WS2 Film with Low-Power RF-Magnetron Sputtering

[H-2-04] Grain Size Enlargement in 2D WS₂ Film with Low-Power RF-Magnetron Sputtering