Grain Size Enlargement in 2D WS<sub>2</sub> Film with Low-Power RF-Magnetron Sputtering

Takuya Hamada, Taiga Horiguchi, Masaya Hamada, Iriya Muneata, Kuniyuki Kakushima, Kazuo Tsutsui, Tetsuya Tatsumi, Shigetaka Tomiya, Hitoshi Wakabayashi

doi:https://doi.org/10.7567/SSDM.2021.H-2-04

4:29 PM - 4:36 PM

[H-2-04] Grain Size Enlargement in 2D WS₂ Film with Low-Power RF-Magnetron Sputtering

〇Takuya Hamada¹, Taiga Horiguchi¹, Masaya Hamada¹, Iriya Muneata¹, Kuniyuki Kakushima¹, Kazuo Tsutsui¹, Tetsuya Tatsumi¹, Shigetaka Tomiya¹, Hitoshi Wakabayashi¹ (1.Tokyo Tech)

https://doi.org/10.7567/SSDM.2021.H-2-04

2021 International Conference on Solid State Devices and Materials

[H-2-04] Grain Size Enlargement in 2D WS2 Film with Low-Power RF-Magnetron Sputtering

[H-2-04] Grain Size Enlargement in 2D WS₂ Film with Low-Power RF-Magnetron Sputtering