The Japan Society of Applied Physics

16:36 〜 16:43

[H-2-05] Growth Mechanism of PVD MoS2 Film from Sub-Monolayer Region

〇Ryo Ono1、Shinya Imai1、Yuta Kusama2、Takuya Hamada1、Masaya Hamada1、Iriya Muneta1、Kuniyuki Kakushima1、Kazuo Tsutsui1、Nobuyuki Ikarashi2、Hitoshi Wakabayashi1 (1.Tokyo Inst. of Tech.、2.Nagoya Univ.)

https://doi.org/10.7567/SSDM.2021.H-2-05