4:36 PM - 4:43 PM

[H-2-05] Growth Mechanism of PVD MoS2 Film from Sub-Monolayer Region

〇Ryo Ono¹, Shinya Imai¹, Yuta Kusama², Takuya Hamada¹, Masaya Hamada¹, Iriya Muneta¹, Kuniyuki Kakushima¹, Kazuo Tsutsui¹, Nobuyuki Ikarashi², Hitoshi Wakabayashi¹ (1.Tokyo Inst. of Tech., 2.Nagoya Univ.)

https://doi.org/10.7567/SSDM.2021.H-2-05